|
 半導體測試片 Dummy Wafer |
Silicon Material Chemical Cleaning/ Etching
晶圓清洗是由化學清洗過程使廢棄的原料重新再生.使從前輕易廢棄的半導體級矽料變成有價值之太陽能級矽料 |
|
| item |
Unit |
6"wafer |
8"wafer |
12"wafer |
Diameeter
|
±0.5mm |
150 |
20 |
300
|
Growth Method
|
|
CZ&FZ |
CZ&FZ |
CZ&FZ |
Orientation
|
±1˚ |
1-0-0/ 1-1-1 |
1-0-0/ 1-1-1 |
1-0-0/ 1-1-1 |
Type
|
|
P/N |
P/N |
P/N |
O.F.Cut
|
±1˚ |
1-1-0 |
1-1-0 |
1-1-0 |
| Thickness |
μm |
≧610 |
≧700 |
≧750 |
|
|
| |
|
